1998    10.1% efficiency of thin film micro-crystalline Si solar cell fabricated on glass substrate by plasma CVD method

2005    13.4% efficiency amorphous Si/micro-crystalline Si tandem solar cell module (3,827 cm2) confirmed at AIST with using newly developed interlayer

2015    25.1% efficiency Cu plated top/rear contact heterojunction Si solar cell

2017   26.7% record-breaking efficiency heterojunction crystalline Si solar cell